WVU NSE Facility Base

Device and Integrated System Design, Fabrication, and Characterization

Integrated Nano/Micro System Design Laboratory

Mixed technology integrated system design requires a broad range of tools from physical (electrical, optical, mechanical) modeling to mathematical analysis to final device mask fabrication. This laboratory provides a continually evolving PC based computer aided design environment which supports research and education requiring the design and simulation of integrated electronic, photonic, and MEMS systems.  The industry standard CAD tools, PCs and other lab equipment have been obtained through sponsored research. The primary tool-suite includes

• Code-V optical CAD
• OptiFDTD finite element integrated optical CAD
• OptiBPM guided wave optical CAD
• Synopsys Technology CAD tool suite (TSUPREM, etc.)
• MAXWELL 2-D Electrostatic Solver
• LASI and LEDIT Mask Design Tools
• MCNC CAMEL MUMPs Standard Cell Library
• Intellisuite Mcirosystem Design Tool
• ANSYS mechanical/physical modeling tool
• Matlab and Simulink
• EBES Mask Design Tool (for Physics Dept. System)

Photonic and Electronic Technologies Laboratory

This laboratory spans two locations in the Engineering Research Building and provides extensive capabilities for characterization of electronic, photonic and MEMs devices and systems. The photonic and electronic equipment is used to test and measure advanced die, wafer and package-based technologies in mixed technology systems. The lab’s equipment base represents the results of corporate donations and funded program acquisitions including NSF EPSCoR. Equipment includes 

• Three 4 x 8’ optical tables and optical breadboards
• End-fire optical waveguide coupler setup with six axis manipulator with piezoelectric drive,
• Single and multimode optical fiber couplers
• Metricon optical prism coupler system
• Video optical waveguide loss measurement system
• 35mW and 10mW HeNe lasers
• IR viewer and camera, bulk optics and fiber optics
• Extensive optomechanics inventory
• Diode laser driver and thermoelectric cooler
• Optical spectrometer/monochromator
• HP and Advantest Optical spectrum analyzers
• Tektronix Communication Signal analyzer
• Optical power meters,
• Polytec-PI Dual Probe Laser Doppler Vibrometer System with nanometer scale capability
• Digilab FTS 7000 Spectrometer with UMA 600 Microscope and Stingray
• Through-wafer optical monitoring setup for MEMS motion characterization
• Computer controlled C-V, I-V, L, G measurement system
• Four Rucker and Coles Probe Stations (Models 680, 666, 660 and 260)
• Closed cycle refrigerator (8K - 300K) with optical and electrical feedthroughs
• Three Alessi probe stations
• HP 4145b semiconductor parameter analyzer
• Misc. test and measurement instrumentation (oscilloscopes, lock-in and current amps, pulse generators, supplies, etc.).

Microfluidic System Fabrication

An extensive tool set for microfluidic system fabrication is in place and under the supervision of Dr. Timperman in The Department of Chemistry on the Downtown Campus of WVU. This tool set includes the following major components:

• Oxford Lasers MP100UV Laser Micromaching System for direct writing of high aspect ratio channels and features in, glass, plastics, and metal microsystems.
• High Pressure Wafer Washing for cleaning glass microfluidic substrates prior to bonding.
• Acid/Piranha wafer/substrate cleaning station.